Bias and self-bias of magnetic macroparticle filters for cathodic arc plasmas
نویسندگان
چکیده
منابع مشابه
Bias and Self-Bias of Magnetic Macroparticle Filters for Cathodic Arc Plasmas
Curved magnetic filters are often used for the removal of macroparticles from cathodic arc plasmas. This study addresses the need to further reduce losses and improving plasma throughput. The central figure of merit is the system coefficient, κ , defined as filtered ion current normalized by the plasma-producing arc current. The coefficient κ is investigated as a function of continuous and puls...
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Cathodic vacuum arc plasmas can be used to produce well adherent, dense, highquality films and coatings provided macroparticles are removed from the plasma. Both plasma and macroparticles are produced at cathode spots, and in most cases both can easily be observed because they emit light. The nature of this light emission is briefly discussed. Using open, curved solenoids as magnetic filters, o...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2003
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1570931